Institute of Electrical Engineering, Slovak Academy of Sciences
Appliant
Role in the project
Project applicant and coordinator. Fabrication of ALD TiO2-based sensing elements and CBA vehicles, electrical characterization & material analyses throughout the project, of single elements and CBAs.
IEE-SAS has been on the forefront of the semiconductor research in Slovakia for the past two decades. Micro-electronic devices such as sensors, memristors and detectors are being developed based on novel, beyond-silicon-based materials. The institute is equipped with the necessary infrastructure for fabrication of semiconductor chips from an R&D up to 4” wafer scale, this highly contributing to the R&D capacities of the whole consortium. On an analyses scale, besides deep expertise and robust equipment for electrical characterization, there is plenty of microscopy and spectroscopy techniques available at the institute or in the Academy campus.
The research group involved in the project is composed of selected researchers based on their expertise. The PI of the team is Boris Hudec, PhD. (Scopus h-index 16), who was responsible for management and execution of the IEE-SAS’s work-package dedicated to sensors of recently finished 2- year-long H2020 project ATOPLOT on the development of Atomic-layer 3D plotter technology. Currently he is a coordinator of smaller follow-up project ATOSENS funded under the m-ERA.net 2022 Joint Call. He has been working on ALD memristor devices for memories and neuromorphic computing for the last decade, including his 5+ years stay at the NYCU University in Taiwan. He’s an expert in ALD, memristors, dielectrics, nanoscale sensors, and electrical characterization. The team will include his PhD. and MSc. students, besides additional experts in nano-fabrication, physical vapour deposition (PVD), electron microscopy and electrical characterization of films and devices from IEE-SAS.
Comenius University Bratislava
Partner 1
Role in the project
The CUB’s role in the project is leading the work package KPB1 – H2 sensing element, and participating in WPs KPB2 and KPB3, with the focus on characterization of the gas sensing and electrical transport properties of the fabricated sensors. The team will also participate in the fabrication and microscopic, structural and compositional analyses, it will also act as a strong knowledge-base partner on the Pt/TiO2-based hydrogen sensors in general.
Led by assoc. prof. Tomáš Plecenik, the CUB team has been intensively studying Pt/TiO2- based hydrogen sensors for the last 10+ years, profiling themselves as experts in the field, realizing several breakthrough concepts such as vertical MIM sensing structure (suitable for CBA, used in this proposal), or gasistor (memristive sensing element based on TiO2).
The team is also highly experienced in fabrication, modification, patterning and complex characterization of a large variety of thin/thick films and thin film micro/nano structures. The team possesses extensive knowledge of physical vapour deposition (PVD) methods (magnetron sputtering, vacuum evaporation, pulsed laser deposition), numerous microscopic, structural and compositional analysis techniques (SEM, AFM, XRD, EDX, WDS, XPS, AES and others) and is highly experienced in characterization of gas sensing and electrical transport properties in a wide range of temperatures and other external conditions. The involved researchers are selected based on their expertise required for the implementation of the project.
The PI of the team, assoc. prof. Tomáš Plecenik (Scopus h-index 21) is highly experienced in electrical transport and gas sensing measurements of MOS gas sensors. The second key researcher of the team, assoc. prof. Martin Moško (Scopus h-index 13) is a theoretical physicist with extensive knowledge of mesoscopic physics and electrical transport in solids, who will be unvaluable in interpretation of the electrical transport and gas sensing experimental data and subsequent optimization of the sensory structures. The team also consist of another four researchers, who are experts in thin film deposition by PVD methods and microscopic, structural and compositional characterization of thin films and thin film micro-structures.
Institute of Informatics, Slovak Academy of Sciences
Partner 2
Role in the project
The role of II-SAS in the project is leading the work package – SeNN algorithm, and participating in WPs, with the focus on SeNN algorithm and MLL lithography of the TiO2 gas sensor structures.
Robert Andok (key researcher at II-SAS) is currently the director of II-SAS (since 2021). He has more than 24 years experiences in the field of electron-beam lithography, micro- and nanotechnology, MEMS, sensoric technologies. He is author/coauthor of more than 90 publications (43 CC/Wos/Scopus) and 2 utility models, with h-index 6. He has had many years of experiences in applied research in the reserach EU frame projects, a H2020 project, bilateral projects, APVV and VEGA grants, Centre of excellence projects of the SAS. Martin Predanocy (key researcher at II-SAS) is a co-researcher of several domestic (APVV, VEGA) and international scientific projects focused on developing new sensor structures and materials for microsensors. He is experienced in the field of sensoric structures and MEMS based on TiO2 thin layers. He is the author and co-author of several scientific articles, among them 25 CC publications and 150 citations according to SCOPUS database.